Imaging and illumination for metrology and inspection : 2-4 November 1994, Boston, Massachusetts

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Imaging and illumination for metrology and inspection : 2-4 November 1994, Boston, Massachusetts

Donald J. Svetkoff, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2348）

SPIE, c1995

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Includes bibliographical references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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