A review: ultrahigh-vacuum technology for electron microscopes

著者

• 吉村, 長光 ヨシムラ, ナガミツ

書誌事項

A review: ultrahigh-vacuum technology for electron microscopes

Nagamitsu Yoshimura

Academic Press, an imprint of Elsevier, c2020

• : [pbk.]

注記

Includes bibliographical references and index

内容説明・目次

内容説明

A Review: Ultrahigh-Vacuum Technology for Electron Microscopes provides information on the fundamentals of ultra-high vacuum systems. It covers the very subtle process that can help increase pressure inside the microscope (or inside any other ultra-high vacuum system) and the different behavior of the molecules contributing to this kind of process. Prof Yoshimura's book offers detailed information on electron microscope components, as well as UHV technology. This book is an ideal resource for industrial microscopists, engineers and scientists responsible for the design, operation and maintenance of electron microscopes. In addition, engineering students or engineers working with electron microscopes will find it useful.

目次

1. Phenomena Induced by Fine Electron-Probe Irradiation2. Electron Induced Gas Desorption3. Microdischarges in High Vacuum4. Sputter-Ion Pump (SIP) for Extreme-High-Vacuum Use5. Development of Diffusion Pump (DP) System for Electron Microscopes

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BC05281095
• ISBN:
  • 9780128185735
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: London
• ページ数/冊数: xxvii, 545 p.
• 大きさ: 28 cm
• 分類:
  • DC23 : 621.55
• 件名:
  • LCSH : Ultrahigh vacuum
  • LCSH : Vacuum technology
  • LCSH : Electron microscopes