Secondary electron energy spectroscopy in the scanning electron microscope

著者

• Khursheed, Anjam

書誌事項

Secondary electron energy spectroscopy in the scanning electron microscope

Anjam Khursheed

World Scientific, c2021

注記

Includes bibliographical references (p. 307-324) and index

内容説明・目次

内容説明

This book deals with the subject of secondary energy spectroscopy in the scanning electron microscope (SEM). The SEM is a widely used research instrument for scientific and engineering research and its low energy scattered electrons, known as secondary electrons, are used mainly for the purpose of nanoscale topographic imaging. This book demonstrates the advantages of carrying out precision electron energy spectroscopy of its secondary electrons, in addition to them being used for imaging. The book will demonstrate how secondary electron energy spectroscopy can transform the SEM into a powerful analytical tool that can map valuable material science information to the nanoscale, superimposing it onto the instrument's normal topographic mode imaging. The book demonstrates how the SEM can then be used to quantify/identify materials, acquire bulk density of states information, capture dopant density distributions in semiconductor specimens, and map surface charge distributions.

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詳細情報

• NII書誌ID(NCID): BC05505647
• ISBN:
  • 9789811227028
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Hackensack, N.J.
• ページ数/冊数: xv, 327 p.
• 大きさ: 24 cm
• 件名:
  • LCSH : Scanning electron microscopes