Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California

Author(s)

• Integrated Circuit Metrology, Inspection, and Process Control Symposium
• Bennett, Marylyn Hoy
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California

Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2439）

SPIE, c1995

• pbk.

Other Title

Integrated circuit metrology, inspection, and process control 9

Note

Includes bibliographical references and author index

Details

• NCID: BC06573289
• ISBN:
  • 0819417874
• LCCN: 94069902
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: xi, 514 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
  • LCSH : Process control -- Congresses
  • LCSH : Optical measurements -- Congresses
  • LCSH : Scanning electron microscopes -- Congresses
• Parent Bibliography ID:
  • BA0022700X