Microelectronic device and multilevel interconnection technology : 25-26 October 1995, Austin, Texas

著者

• Chen, Ih-Chin
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microelectronic device and multilevel interconnection technology : 25-26 October 1995, Austin, Texas

Ih-Chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2636）

SPIE, c1995

注記

Includes bibliographic references and index

詳細情報

• NII書誌ID(NCID): BC06604462
• ISBN:
  • 0819420026
• LCCN: 95070379
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 326 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectronics -- Congresses
• 親書誌ID:
  • BA0022700X