Microelectronic device and multilevel interconnection technology : 25-26 October 1995, Austin, Texas

Author(s)

• Chen, Ih-Chin
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microelectronic device and multilevel interconnection technology : 25-26 October 1995, Austin, Texas

Ih-Chin Chen ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2636）

SPIE, c1995

Note

Includes bibliographic references and index

Details

• NCID: BC06604462
• ISBN:
  • 0819420026
• LCCN: 95070379
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: viii, 326 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
• Parent Bibliography ID:
  • BA0022700X