Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas

Author(s)

• Sabnis, Anant G.
• Raaijmakers, Ivo J.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas

Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2637）

SPIE, c1995

Note

Includes bibliographic references and author index

Details

• NCID: BC06604531
• ISBN:
  • 0819420034
• LCCN: 95070380
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 238 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC21 : 621.3815
• Subject Headings:
  • LCSH : Integrated circuits industry -- Congresses
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Plasma etching -- Congresses
  • LCSH : Metallizing -- Congresses
• Parent Bibliography ID:
  • BA0022700X