Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas

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Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas

Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2637）

SPIE, c1995

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Includes bibliographic references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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