Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas
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Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2641)
SPIE, c1995
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Includes bibliographic references and index