Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas

Author(s)

• Bailey, Wayne E.
• Motamedi, M. Edward
• Luo, Fang-Chen
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas

Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2641）

SPIE, c1995

Note

Includes bibliographic references and index

Details

• NCID: BC06604906
• ISBN:
  • 0819420077
• LCCN: 95070376
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: v, 154 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronics -- Congresses
• Parent Bibliography ID:
  • BA0022700X