Micromachined devices and components : 23-24 October, 1995, Austin, Texas

Author(s)

• Roop, Ray
• Chau, Kevin
• Semiconductor Equipment and Materials International
• Society of Photo-optical Instrumentation Engineers
• United States. National Institute of Standards and Technology

Bibliographic Information

Micromachined devices and components : 23-24 October, 1995, Austin, Texas

Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2642）

SPIE, c1995

Note

Includes bibliographic references and index

Details

• NCID: BC06604972
• ISBN:
  • 0819420085
• LCCN: 95070377
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 296 p.
• Size: 28 cm
• Classification:
  • LCC : TJ163
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Micromachining -- Congresses
• Parent Bibliography ID:
  • BA0022700X