Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California
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Miniaturized systems with micro-optics and micromechanics : 30-31 January 1996, San Jose, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 2687)
SPIE, c1996
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Miniaturized systems with micro optics and micromechanics
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Includes bibliographical references and index