Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas

Author(s)

• Process, Equipment, and Materials Control in Integrated Circuit Manufacturing (Symposium)
• Iturralde, Armando
• Lin, Te-Hua
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas

Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2876）

SPIE, c1996

Other Title

Process, equipment, and materials control in integrated circuit manufacturing 2

Note

Includes bibliographic references and author index

Details

• NCID: BC06860010
• ISBN:
  • 0819422746
• LCCN: 96069471
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vii, 258 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Plasma etching -- Congresses
  • LCSH : Metallizing -- Congresses
  • LCSH : Dielectric films -- Congresses
• Parent Bibliography ID:
  • BA0022700X