Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas

著者

• Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing (Symposium)
• DeBusk, Damon
• Chen, Ray T.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas

Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2877）

SPIE, c1996

タイトル別名

Optical characterization techniques for high-performance microelectronic device manufacturing 3

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC06860076
• ISBN:
  • 0819422754
• LCCN: 96069472
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 218 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7836
  • DC22 : 621.3815/2
• 件名:
  • LCSH : Integrated circuits industry -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Semiconductors -- Testing -- Optical methods -- Congresses
  • LCSH : Optical detectors -- Congresses
• 親書誌ID:
  • BA0022700X