Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore

Author(s)

• Yoon, Soon-Fatt
• Yu, Raymond
• Mack, Chris A.
• Society of Photo-optical Instrumentation Engineers
• Society of Photo-optical Instrumentation Engineers. Singapore Chapter
• Institute of Physics, Singapore
• Society of Photo-optical Instrumentation Engineers. Japan Chapter

Bibliographic Information

Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore

Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3183）

SPIE, c1997

Note

Includes bibliographic references and author index

• NCID: BC06943796
• ISBN:
  • 0819426105
• LCCN: 98122037
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: vii, 264 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.3815
• Subject Headings:
  • LCSH : Microlithography -- Industrial applications -- Congresses
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Process control -- Congresses
• Parent Bibliography ID:
  • BA0022700X