Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore

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Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore

Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3183)

SPIE, c1997

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Includes bibliographic references and author index

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