Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore

著者

• Yoon, Soon-Fatt
• Yu, Raymond
• Mack, Chris A.
• Society of Photo-optical Instrumentation Engineers
• Society of Photo-optical Instrumentation Engineers. Singapore Chapter
• Institute of Physics, Singapore
• Society of Photo-optical Instrumentation Engineers. Japan Chapter

書誌事項

Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore

Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [et al.] ; cooperating organizations Nanyang Technological University (Singapore) ... [et al.] ; published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3183）

SPIE, c1997

注記

Includes bibliographic references and author index

詳細情報

• NII書誌ID(NCID): BC06943796
• ISBN:
  • 0819426105
• LCCN: 98122037
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: vii, 264 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.3815
• 件名:
  • LCSH : Microlithography -- Industrial applications -- Congresses
  • LCSH : Integrated circuits -- Design and construction -- Congresses
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Process control -- Congresses
• 親書誌ID:
  • BA0022700X