Micromachined devices and components III : 29 September 1997, Austin, Texas

Author(s)

• Chau, Kevin
• French, Patrick J.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology

Bibliographic Information

Micromachined devices and components III : 29 September 1997, Austin, Texas

Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3224）

SPIE, c1997

Other Title

Micromachined devices and components 3

Micromachined devices and components three

Note

Includes bibliographical references and index

Details

• NCID: BC06946036
• ISBN:
  • 0819426563
• LCCN: 98122098
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 382 p.
• Size: 28 cm
• Classification:
  • LCC : TJ163
  • DC21 : 621.3815/2
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Micromachining -- Congresses
• Parent Bibliography ID:
  • BA0022700X