Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas

Author(s)

• Motamedi, M. Edward
• Herzig, Hans Peter
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology

Bibliographic Information

Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3226）

SPIE, c1997

Other Title

Microelectronic structures and MEMS for optical processing 3

Note

Includes bibliographic references and index

Details

• NCID: BC06946171
• ISBN:
  • 081942658X
• LCCN: 98122103
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: v, 214 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381/045
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronics -- Congresses
• Parent Bibliography ID:
  • BA0022700X