Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas

著者

• Motamedi, M. Edward
• Herzig, Hans Peter
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• United States. National Institute of Standards and Technology

書誌事項

Microelectronic structures and MEMS for optical processing III : 29-30 September, 1997, Austin, Texas

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3226）

SPIE, c1997

タイトル別名

Microelectronic structures and MEMS for optical processing 3

注記

Includes bibliographic references and index

• NII書誌ID(NCID): BC06946171
• ISBN:
  • 081942658X
• LCCN: 98122103
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: v, 214 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381/045
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronics -- Congresses
• 親書誌ID:
  • BA0022700X