Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California

Author(s)

• Dubowski, J. J.
• Dyer, Peter E.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California

Jan J. Dubowski, Peter E. Dyer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3274）

SPIE, c1998

Other Title

Laser applications in microelectronic and optoelectronic manufacturing 3

Note

Includes bibliographical references and index

Details

• NCID: BC06948712
• ISBN:
  • 0819427136
• LCCN: 98233181
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 344 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics industry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Optoelectronics industry -- Congresses
• Parent Bibliography ID:
  • BA0022700X