Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California

著者

• Dubowski, J. J.
• Dyer, Peter E.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California

Jan J. Dubowski, Peter E. Dyer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3274）

SPIE, c1998

タイトル別名

Laser applications in microelectronic and optoelectronic manufacturing 3

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC06948712
• ISBN:
  • 0819427136
• LCCN: 98233181
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 344 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7836
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectronics industry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Optoelectronics industry -- Congresses
• 親書誌ID:
  • BA0022700X