Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California

著者

• Dubowski, J. J.
• Dyer, Peter E.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Laser applications in microelectronic and optoelectronic manufacturing III : 26-28 January 1998, San Jose, California

Jan J. Dubowski, Peter E. Dyer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3274）

SPIE, c1998

タイトル別名

Laser applications in microelectronic and optoelectronic manufacturing 3

注記

Includes bibliographical references and index

内容説明・目次

内容説明

The 37 papers collected in this text examine aspects of laser applications in microelectronic and optoelectronic manufacturing. Topics discussed include processes and diagnostics of laser ablation, methods and tools for laser microfabrication and defect correction.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BC06948712
• ISBN:
  • 0819427136
• LCCN: 98233181
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 344 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7836
  • DC21 : 621.381
• 件名:
  • LCSH : Microelectronics industry -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Optoelectronics industry -- Congresses
• 親書誌ID:
  • BA0022700X