International Conference on Applied Optical Metrology : 8-11 June 1998, Balatonfüred, Hungary
著者
書誌事項
International Conference on Applied Optical Metrology : 8-11 June 1998, Balatonfüred, Hungary
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3407)
SPIE, c1998
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This text brings together 77 papers from the 1998 International Conference on Applied Optical Metrology. They examine topics such as the state of the art in optical metrology, optical methods for the testing of microsystem elements, and fibre optic sensors and their applications.
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