Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California

著者

• Friedrich, Craig
• Vladimirsky, Yuli
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California

Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3512）

SPIE, c1998

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC07260187
• ISBN:
  • 0819429716
• LCCN: 99200311
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xi, 442 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 671.3/5
• 件名:
  • LCSH : Micromachining Congresses
  • LCSH : Electromechanical devices Congresses
  • LCSH : Micromechanics Congresses
• 親書誌ID:
  • BA0022700X