Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

Author(s)

• Motamedi, M. Edward
• Herzig, Hans Peter
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3513）

SPIE, c1998

Other Title

Microelectronic structures and MEMS for optical processing 4

Note

Includes bibliographical references and index

Details

• NCID: BC07260212
• ISBN:
  • 0819429724
• LCCN: 98226767
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: vii, 240 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381/045
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronics -- Congresses
• Parent Bibliography ID:
  • BA0022700X