Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

著者

• Motamedi, M. Edward
• Herzig, Hans Peter
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

書誌事項

Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3513）

SPIE, c1998

タイトル別名

Microelectronic structures and MEMS for optical processing 4

注記

Includes bibliographical references and index

内容説明・目次

内容説明

A volume of papers on microelectronic structures and MEMS for optical processing. It explores: micromirrors; micro-optical components and microsensors; optomechanical switches; and modulators and microactuators.

「Nielsen BookData」 より

• NII書誌ID(NCID): BC07260212
• ISBN:
  • 0819429724
• LCCN: 98226767
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Washington
• ページ数/冊数: vii, 240 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC21 : 621.381/045
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optoelectronics -- Congresses
• 親書誌ID:
  • BA0022700X