Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California
著者
書誌事項
Microelectronic structures and MEMS for optical processing IV : 21-22 September, 1998, Santa Clara, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3513)
SPIE, c1998
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Microelectronic structures and MEMS for optical processing 4
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
A volume of papers on microelectronic structures and MEMS for optical processing. It explores: micromirrors; micro-optical components and microsensors; optomechanical switches; and modulators and microactuators.
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