Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California

Author(s)

• French, Patrick J.
• Chau, Kevin
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California

Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3514）

SPIE, c1998

Other Title

Micromachined devices and components 4

Micromachined devices and components four

Note

Includes bibliographical references and author index

Details

• NCID: BC07260267
• ISBN:
  • 0819429732
• LCCN: 98226766
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Washington
• Pages/Volumes: viii, 440 p.
• Size: 28 cm
• Classification:
  • LCC : TJ163
  • DC21 : 620/.5
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Micromachining -- Congresses
• Parent Bibliography ID:
  • BA0022700X