Three-dimensional imaging, optical metrology, and inspection IV : 2-3 November, 1998, Boston, Massachusetts
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Three-dimensional imaging, optical metrology, and inspection IV : 2-3 November, 1998, Boston, Massachusetts
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3520)
SPIE, c1998
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Three dimensional imaging, optical metrology, and inspection 4
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Includes bibliographic references and author index