Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany

Author(s)

• Gorecki, Christophe
• European Optical Society
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany

Christophe Gorecki, chair/editor ; sponsored by EOS--European Optical Society ... [et al.]

（Proceedings EurOpt series）（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3825）

SPIE, c1999

Note

Includes bibliographical references and index

Details

• NCID: BC07402667
• ISBN:
  • 081943311X
• LCCN: 00708945
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: v, 186 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC21 : 621.381
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Optical instruments -- Industrial applications -- Congresses
  • LCSH : Interferometry -- Congresses
  • LCSH : Measurement -- Congresses
• Parent Bibliography ID:
  • BA31190072
  • BA0022700X