Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

Author(s)

Bibliographic Information

Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 3876)

SPIE, c1999

Other Title

Micromachined devices and components 5

Micromachined devices and components five

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Note

Includes bibliographical references and index

Description and Table of Contents

Description

These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.

by "Nielsen BookData"

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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