Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

Author(s)

• French, Patrick J.
• Peeters, Eric
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

Bibliographic Information

Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3876）

SPIE, c1999

Other Title

Micromachined devices and components 5

Micromachined devices and components five

Note

Includes bibliographical references and index

Description and Table of Contents

Description

These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.

by "Nielsen BookData"

Details

• NCID: BC07420884
• ISBN:
  • 0819434736
• LCCN: 00267603
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 304 p.
• Size: 28 cm
• Classification:
  • LCC : TJ163
  • DC21 : 620/.5
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Micromachining -- Congresses
• Parent Bibliography ID:
  • BA0022700X