Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

著者

• French, Patrick J.
• Peeters, Eric
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

書誌事項

Micromachined devices and components V : 20-21 September 1999, Santa Clara, California

Patrick J. French, Eric Peeters, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3876）

SPIE, c1999

タイトル別名

Micromachined devices and components 5

Micromachined devices and components five

注記

Includes bibliographical references and index

内容説明・目次

内容説明

These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BC07420884
• ISBN:
  • 0819434736
• LCCN: 00267603
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 304 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ163
  • DC21 : 620/.5
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Micromachining -- Congresses
• 親書誌ID:
  • BA0022700X