Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

著者

• Motamedi, M. Edward
• Göring, Rolf
• Society of Photo-optical Instrumentation Engineers
• Solid State Technology (Organization)

書誌事項

Miniaturized systems with micro-optics and MEMS : 20-22 September 1999, Santa Clara, California

M.E. Motamedi, Rolf Goering, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3878）

SPIE, c1999

タイトル別名

Miniaturized systems with micro-optics and micromechanics

Miniaturized systems with micro optics and MEMS

注記

Earlier conferences titled: Miniaturized systems with micro-optics and micromechanics

Includes bibliographical references and index

• NII書誌ID(NCID): BC07421129
• ISBN:
  • 0819434752
• LCCN: 00267602
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 426 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TA1660
  • DC21 : 621.36/93
• 件名:
  • LCSH : Integrated optics -- Congresses
  • LCSH : Miniature electronic equipment -- Congresses
  • LCSH : Micromechanics -- Congresses
  • LCSH : Optical scanners -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
• 親書誌ID:
  • BA0022700X