Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA

Author(s)

• Vladimirsky, Yuli
• Coane, Philip J.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• Solid State Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA

Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4175）

SPIE, c2000

Other Title

Materials and device characterization in micromachining 3

Note

Includes bibliographical references and index

Details

• NCID: BC07472720
• ISBN:
  • 0819438316
• LCCN: 2001267484
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 200 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC21 : 671.3/5
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Micromechanics -- Congresses
• Parent Bibliography ID:
  • BA0022700X