Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA
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Micromachined devices and components VI : 18-19 September 2000, Santa Clara, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4176)
SPIE, c2000
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Micromachined devices and components 4
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Includes bibliographical references and index