MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA

著者

• Lawton, Russell A.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• SolidState Technology (Organization)
• Sandia National Laboratories

書誌事項

MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA

Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4180）

SPIE, c2000

タイトル別名

Microelectromechanical systems reliability for critical applications

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BC07472899
• ISBN:
  • 0819438367
• LCCN: 2001274449
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: v, 146 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC21 : 621.31/042
• 件名:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
• 親書誌ID:
  • BA0022700X