MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA

Author(s)

• Lawton, Russell A.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• SolidState Technology (Organization)
• Sandia National Laboratories

Bibliographic Information

MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA

Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4180）

SPIE, c2000

Other Title

Microelectromechanical systems reliability for critical applications

Note

Includes bibliographical references and index

Details

• NCID: BC07472899
• ISBN:
  • 0819438367
• LCCN: 2001274449
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: v, 146 p.
• Size: 28 cm
• Classification:
  • LCC : TK7875
  • DC21 : 621.31/042
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Reliability -- Congresses
• Parent Bibliography ID:
  • BA0022700X