Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore

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Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore

Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4226）

SPIE, c2000

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Microlithographic techniques in integrated circuit fabrication 2

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Includes bibliographical references and index

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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