Micromachining and microfabrication : 28-30 November 2000, Singapore

Author(s)

• Chau, Kevin
• Parameswaran, Ash M.
• Tay, Francis E. H.
• Society of Photo-optical Instrumentation Engineers
• Nanyang Technological University
• Institute of Physics, Singapore

Bibliographic Information

Micromachining and microfabrication : 28-30 November 2000, Singapore

Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4230）

SPIE, c2000

Note

Includes bibliographical references and index

Details

• NCID: BC07475139
• ISBN:
  • 0819439029
• LCCN: 2001278591
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vii, 248 p.
• Size: 28 cm
• Classification:
  • LCC : TJ1191.5
  • DC21 : 671.3/5
• Subject Headings:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
• Parent Bibliography ID:
  • BA0022700X