Micromachining and microfabrication : 28-30 November 2000, Singapore

著者

• Chau, Kevin
• Parameswaran, Ash M.
• Tay, Francis E. H.
• Society of Photo-optical Instrumentation Engineers
• Nanyang Technological University
• Institute of Physics, Singapore

書誌事項

Micromachining and microfabrication : 28-30 November 2000, Singapore

Kevin Chau, Ash M. Parameswaran, Francis E.H. Tay, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4230）

SPIE, c2000

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BC07475139
• ISBN:
  • 0819439029
• LCCN: 2001278591
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vii, 248 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 671.3/5
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
• 親書誌ID:
  • BA0022700X