Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA

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書誌事項

Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA

Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4275）

SPIE, c2001

タイトル別名

Metrology based control for micro manufacturing

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注記

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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