Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany

Author(s)

• Gorecki, Christophe
• Jüptner, Werner P. O.
• Kujawińska, Małgorzata
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany

Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4400）

SPIE, c2001

• pbk.

Other Title

Metrology and inspection

Note

Includes bibliographical references and index

Details

• NCID: BC07734281
• ISBN:
  • 0819440957
• LCCN: 2002265278
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: v, 176 p.
• Size: 28 cm
• Classification:
  • LCC : TS156.A1
  • DC21 : 620/.0044
• Subject Headings:
  • LCSH : Quality control -- Optical methods -- Congresses
  • LCSH : Optical detectors -- Industrial applications -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Interferometry -- Congresses
• Parent Bibliography ID:
  • BA0022700X