Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany

著者

• Gorecki, Christophe
• Jüptner, Werner P. O.
• Kujawińska, Małgorzata
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microsystems engineering : metrology and inspection : 20-21 June 2001, Munich, Germany

Christophe Gorecki, Werner P.O. Jüptner, Malgorzata Kujawińska, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4400）

SPIE, c2001

• pbk.

タイトル別名

Metrology and inspection

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BC07734281
• ISBN:
  • 0819440957
• LCCN: 2002265278
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: v, 176 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TS156.A1
  • DC21 : 620/.0044
• 件名:
  • LCSH : Quality control -- Optical methods -- Congresses
  • LCSH : Optical detectors -- Industrial applications -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Interferometry -- Congresses
• 親書誌ID:
  • BA0022700X