Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

著者

• Gorecki, Christophe
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik
• Society of Photo-optical Instrumentation Engineers

書誌事項

Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5145）

SPIE, c2003

タイトル別名

Metrology and inspection

Microsystems engineering : metrology and inspection 3

注記

Includes bibliographical references and author index

• NII書誌ID(NCID): BC07734328
• ISBN:
  • 0819450154
• LCCN: 2004267084
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 210 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TS156.2
  • DC22 : 620/.0044
• 件名:
  • LCSH : Quality control -- Optical methods -- Congresses
  • LCSH : Optical detectors -- Industrial applications -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Interferometry -- Congresses
  • LCSH : Measurement -- Congresses
• 親書誌ID:
  • BA0022700X