Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

Author(s)

• Gorecki, Christophe
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany

Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5145）

SPIE, c2003

Other Title

Metrology and inspection

Microsystems engineering : metrology and inspection 3

Note

Includes bibliographical references and author index

Details

• NCID: BC07734328
• ISBN:
  • 0819450154
• LCCN: 2004267084
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 210 p.
• Size: 28 cm
• Classification:
  • LCC : TS156.2
  • DC22 : 620/.0044
• Subject Headings:
  • LCSH : Quality control -- Optical methods -- Congresses
  • LCSH : Optical detectors -- Industrial applications -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Interferometry -- Congresses
  • LCSH : Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X