Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA

Author(s)

• Kley, Ernst-Bernhard
• Herzig, Hans Peter
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, USA

Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4440）

SPIE, c2001

Note

Includes bibliographical references and index

Details

• NCID: BC07740331
• ISBN:
  • 0819441546
• LCCN: 2002277171
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: x, 324 p.
• Size: 28 cm
• Classification:
  • LCC : TS510
  • DC21 : 681/.4
• Subject Headings:
  • LCSH : Optical instruments -- Design and construction -- Congresses
  • LCSH : Lenses -- Design and construction -- Congresses
  • LCSH : Micromachining -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X