Optical metrology in production engineering : 27-30 April, 2004, Strasbourg, France

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Optical metrology in production engineering : 27-30 April, 2004, Strasbourg, France

Wolfgang Osten, Mitsuo Takeda, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society (United Kingdom) ... [et al.]

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5457)

SPIE, c2004

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Includes bibliographical references and author index

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