Nanostructure science, metrology, and technology : 5-7 September 2001, Gaithersburg, USA

著者

• Peckerar, Martin C.
• Postek, Michael T.
• Society of Photo-optical Instrumentation Engineers
• United States. National Institute of Standards and Technology
• United States. Office of Naval Research

書誌事項

Nanostructure science, metrology, and technology : 5-7 September 2001, Gaithersburg, USA

Martin C. Peckerar, Michael T. Postek, Jr., chairs/editors ; sponsored by SPIE-the International Society for Optical Engineering, National Institute of Standards and Technology (USA), Office of Naval Research (USA)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4608）

SPIE-the International Society for Optical Engineering, c2002

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BC08359315
• ISBN:
  • 0819443476
• LCCN: 2003268907
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: x, 278 p.
• 大きさ: 28 cm
• 分類:
  • LCC : T174.7
  • DC22 : 620/.5
• 件名:
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Nanostructures -- Congresses
  • LCSH : Metrology -- Congresses
  • LCSH : Microelectronics -- Congresses
• 親書誌ID:
  • BA0022700X