Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

Author(s)

• Ottevaere, Heidi
• DeWolf, Peter
• Wiersma, Diederik S.
• European Optical Society
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Nano- and micro-metrology : 16-17 June 2005, Munich, Germany

Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society ... [et al.] ; published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5858）

SPIE, c2005

• pbk.

Other Title

Nanometrology and micrometrology

Nano and micro metrology

Note

Includes bibliographical references and author index

Description and Table of Contents

Description

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

by "Nielsen BookData"

Details

• NCID: BC08360460
• ISBN:
  • 0819458589
• LCCN: 2005284352
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : QC367
  • DC22 : 681/.25
• Subject Headings:
  • LCSH : Optical measurements -- Congresses
• Parent Bibliography ID:
  • BA0022700X