MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium

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書誌事項

MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium

Uwe F. W. Behringer ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4945）

SPIE, c2003

タイトル別名

MEMS, MOEMS

Advances in photonic communications, sensing, metrology, packaging and assembly

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Includes bibliographical references and author index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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