Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

著者

• Tan, Hark Hoe
• Society of Photo-optical Instrumentation Engineers
• Australian National University
• Australian National University. Research School of Physical Sciences
• University of Adelaide. Centre for Biomedical Engineering

書誌事項

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6800）

SPIE, c2008

タイトル別名

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology 4

Device and process technologies for MEMS, microelectronics, and photonics

注記

Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics

Includes bibliographical references and index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

「Nielsen BookData」 より

• NII書誌ID(NCID): BC08646099
• ISBN:
  • 9780819469717
• LCCN: 2010483564
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TK7875
  • DC22 : 621.381
• 件名:
  • LCSH : Microelectromechanical systems -- Congresses
  • LCSH : Photonics -- Congresses
  • LCSH : Photomechanical processes -- Congresses
  • LCSH : Photolithography -- Congresses
  • LCSH : Nanotechnology -- Congresses
• 親書誌ID:
  • BA0022700X