Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

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Bibliographic Information

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6800）

SPIE, c2008

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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology 4

Device and process technologies for MEMS, microelectronics, and photonics

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Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics

Includes bibliographical references and index

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Description

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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